Annealing nano-to-micro contacts for improved contact resistance

H. Chiamori, Xiaoming Wu, Xishan Guo, Bao Quoc Ta, Liwei Lin. Annealing nano-to-micro contacts for improved contact resistance. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 666-670, IEEE, 2010. [doi]

Abstract

Abstract is missing.