Three DFM Challenges: Random Defects, Thickness Variation, and Printability Variation

Charles Chiang, Jamil Kawa. Three DFM Challenges: Random Defects, Thickness Variation, and Printability Variation. In IEEE Asia Pacific Conference on Circuits and Systems 2006, APCCAS 2006, Singapore, 4-7 December 2006. pages 1099-1102, IEEE, 2006. [doi]

Abstract

Abstract is missing.