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Big data analytics for modeling WAT parameter variation induced by process tool in semiconductor manufacturing and empirical study

Chen-Fu Chien, Ying-Jen Chen, Jei-Zheng Wu. Big data analytics for modeling WAT parameter variation induced by process tool in semiconductor manufacturing and empirical study. In Winter Simulation Conference, WSC 2016, Washington, DC, USA, December 11-14, 2016. pages 2512-2522, IEEE, 2016. [doi]

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Chen-Fu Chien

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Ying-Jen Chen

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Jei-Zheng Wu

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