Chen-Fu Chien, Ying-Jen Chen, Jei-Zheng Wu. Big data analytics for modeling WAT parameter variation induced by process tool in semiconductor manufacturing and empirical study. In Winter Simulation Conference, WSC 2016, Washington, DC, USA, December 11-14, 2016. pages 2512-2522, IEEE, 2016. [doi]
@inproceedings{ChienCW16-0,
title = {Big data analytics for modeling WAT parameter variation induced by process tool in semiconductor manufacturing and empirical study},
author = {Chen-Fu Chien and Ying-Jen Chen and Jei-Zheng Wu},
year = {2016},
doi = {10.1109/WSC.2016.7822290},
url = {http://dx.doi.org/10.1109/WSC.2016.7822290},
researchr = {https://researchr.org/publication/ChienCW16-0},
cites = {0},
citedby = {0},
pages = {2512-2522},
booktitle = {Winter Simulation Conference, WSC 2016, Washington, DC, USA, December 11-14, 2016},
publisher = {IEEE},
isbn = {978-1-5090-4486-3},
}