Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing

Chen-Fu Chien, Wei-Tse Hung, Chin-Wei Pan, Tran Hong Van Nguyen. Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing. Computers & Industrial Engineering, 169:108245, 2022. [doi]

Abstract

Abstract is missing.