Chen-Fu Chien, Peng-Chieh Lee, Runliang Dou, Ying-Jen Chen, Chia-Cheng Chen. Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing. In 13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017. pages 739-743, IEEE, 2017. [doi]
@inproceedings{ChienLDCC17,
title = {Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing},
author = {Chen-Fu Chien and Peng-Chieh Lee and Runliang Dou and Ying-Jen Chen and Chia-Cheng Chen},
year = {2017},
doi = {10.1109/COASE.2017.8256192},
url = {https://doi.org/10.1109/COASE.2017.8256192},
researchr = {https://researchr.org/publication/ChienLDCC17},
cites = {0},
citedby = {0},
pages = {739-743},
booktitle = {13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017},
publisher = {IEEE},
isbn = {978-1-5090-6781-7},
}