Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing

Chen-Fu Chien, Peng-Chieh Lee, Runliang Dou, Ying-Jen Chen, Chia-Cheng Chen. Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing. In 13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017. pages 739-743, IEEE, 2017. [doi]

Abstract

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