Performance and process characteristic of glass interposer with through-glass-via(TGV)

Chun-Hsien Chien, Hsun Yu, Ching-Kuan Lee, Yu-Min Lin, Ren-Shin Cheng, Chau-Jie Zhan, Peng-Shu Chen, Chang-Chih Liu, Chao-Kai Hsu, Hsiang-Hung Chang, Huan-Chun Fu, Yuan-Chang Lee, Wen-Wei Shen, Cheng-Ta Ko, Wei-Chung Lo, Yung Jean Lu. Performance and process characteristic of glass interposer with through-glass-via(TGV). In 2013 IEEE International 3D Systems Integration Conference (3DIC), San Francisco, CA, USA, October 2-4, 2013. pages 1-7, IEEE, 2013. [doi]

Authors

Chun-Hsien Chien

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Hsun Yu

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Ching-Kuan Lee

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Yu-Min Lin

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Ren-Shin Cheng

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Chau-Jie Zhan

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Peng-Shu Chen

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Chang-Chih Liu

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Chao-Kai Hsu

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Hsiang-Hung Chang

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Huan-Chun Fu

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Yuan-Chang Lee

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Wen-Wei Shen

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Cheng-Ta Ko

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Wei-Chung Lo

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Yung Jean Lu

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