Investigations and detections on a new BEOL dielectric failure mechanism at advanced technologies

Wei-Ting Kary Chien, Atman Yong Zhao, Liwen Zhang, Zhijuan Wang. Investigations and detections on a new BEOL dielectric failure mechanism at advanced technologies. Microelectronics Reliability, 81:368-372, 2018. [doi]

Abstract

Abstract is missing.