George L.-T. Chiu, Jane M. Shaw. Optical lithography: Introduction. IBM Journal of Research and Development, 41(1&2):3-6, 1997. [doi]
@article{ChiuS97,
title = {Optical lithography: Introduction},
author = {George L.-T. Chiu and Jane M. Shaw},
year = {1997},
doi = {10.1147/rd.411.0003},
url = {http://dx.doi.org/10.1147/rd.411.0003},
researchr = {https://researchr.org/publication/ChiuS97},
cites = {0},
citedby = {0},
journal = {IBM Journal of Research and Development},
volume = {41},
number = {1&2},
pages = {3-6},
}