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Sheng-Ren Chiu, Li-Tao Teng, Jen-Wei Chao, Chung-Yang Sue, Chih-Hsiou Lin, Hong-Ren Chen, Yan-Kuin Su. An Integrated Thermal Compensation System for MEMS Inertial Sensors. Sensors, 14(3):4290-4311, 2014. [doi]
Abstract is missing.