Kwang-Hyun Cho, Jong-Tae Lim. Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process. IEEE Transactions on Robotics, 14(2):348-351, 1998. [doi]
@article{ChoL98-2,
title = {Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process},
author = {Kwang-Hyun Cho and Jong-Tae Lim},
year = {1998},
doi = {10.1109/70.681255},
url = {http://dx.doi.org/10.1109/70.681255},
researchr = {https://researchr.org/publication/ChoL98-2},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Robotics},
volume = {14},
number = {2},
pages = {348-351},
}