A practical view of stability analysis in discrete event dynamic systems: a case study on plasma etching system

Kwang-Hyun Cho, Jong-Tae Lim. A practical view of stability analysis in discrete event dynamic systems: a case study on plasma etching system. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, SMC 1998, Hyatt Regency La Jolla, San Diego, California, USA, October 11-14,1998. pages 627-631, IEEE, 1998. [doi]

Abstract

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