A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques - researchr publication authors

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Hyung Min Cho, Kyung-Hee Lee, Peter Shim, Anthony Park. A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques. In International Conference on Artificial Intelligence in Information and Communication, ICAIIC 2021, Jeju Island, South Korea, April 13-16, 2021. pages 488-491, IEEE, 2021. [doi]

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