Hyung Min Cho, Kyung-Hee Lee, Peter Shim, Anthony Park. A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques. In International Conference on Artificial Intelligence in Information and Communication, ICAIIC 2021, Jeju Island, South Korea, April 13-16, 2021. pages 488-491, IEEE, 2021. [doi]
@inproceedings{ChoLSP21,
title = {A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques},
author = {Hyung Min Cho and Kyung-Hee Lee and Peter Shim and Anthony Park},
year = {2021},
doi = {10.1109/ICAIIC51459.2021.9415241},
url = {https://doi.org/10.1109/ICAIIC51459.2021.9415241},
researchr = {https://researchr.org/publication/ChoLSP21},
cites = {0},
citedby = {0},
pages = {488-491},
booktitle = {International Conference on Artificial Intelligence in Information and Communication, ICAIIC 2021, Jeju Island, South Korea, April 13-16, 2021},
publisher = {IEEE},
isbn = {978-1-7281-7638-3},
}