ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction

Minsik Cho, Kun Yuan, Yongchan Ban, David Z. Pan. ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction. In Limor Fix, editor, Proceedings of the 45th Design Automation Conference, DAC 2008, Anaheim, CA, USA, June 8-13, 2008. pages 504-509, ACM, 2008. [doi]

Abstract

Abstract is missing.