Impact of Chamber/Annealing Temperature on the Endurance Characteristic of Zr: HfO2 Ferroelectric Capacitor

Yejoo Choi, Changwoo Han, Jaemin Shin, Seungjun Moon, Jinhong Min, Hyeonjung Park, Deokjoon Eom, Jehoon Lee, Changhwan Shin. Impact of Chamber/Annealing Temperature on the Endurance Characteristic of Zr: HfO2 Ferroelectric Capacitor. Sensors, 22(11):4087, 2022. [doi]

Authors

Yejoo Choi

This author has not been identified. Look up 'Yejoo Choi' in Google

Changwoo Han

This author has not been identified. Look up 'Changwoo Han' in Google

Jaemin Shin

This author has not been identified. Look up 'Jaemin Shin' in Google

Seungjun Moon

This author has not been identified. Look up 'Seungjun Moon' in Google

Jinhong Min

This author has not been identified. Look up 'Jinhong Min' in Google

Hyeonjung Park

This author has not been identified. Look up 'Hyeonjung Park' in Google

Deokjoon Eom

This author has not been identified. Look up 'Deokjoon Eom' in Google

Jehoon Lee

This author has not been identified. Look up 'Jehoon Lee' in Google

Changhwan Shin

This author has not been identified. Look up 'Changhwan Shin' in Google