A novel pixel design with hybrid type isolation scheme for low dark current in CMOS image sensor

Sung Ho Choi, Yi Tae Kim, Min-seok Oh, Younghwan Park, Jeongjin Cho, Youngheup Jang, Hyungjun Han, Jongwon Choi, Howoo Park, Sangil Jung, Hoon Sang Oh, Jung Chak Ahn, Hiroshige Goto, Chi-young Choi, Yonghan Roh. A novel pixel design with hybrid type isolation scheme for low dark current in CMOS image sensor. In Ralf Widenhorn, Antoine Dupret, editors, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIV, Burlingame, California, USA, February 3-7, 2013. Volume 8659 of SPIE Proceedings, SPIE, 2013. [doi]

Abstract

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