Po-Fat Chong, Xiaomei Shi, Ching-Hsiang Cheng. A novel flexible capacitive micromachined ultrasonic transducer (CMUT) array with isolated metallic islands riveted to a polymer film. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 923-926, IEEE, 2013. [doi]
Abstract is missing.