Jae-Ouk Choo, Raymond A. Adomaitis, Gary W. Rubloff, Laurent Henn-Lecordier, Yuhong Cai. A new approach to spatially controllable CVD. In Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004. pages 287-292, IEEE, 2004. [doi]
Abstract is missing.