Study of the Degree of Automation of High-Tech Smart Factory: Taiwan 12" Semiconductor Factory Case Study

Kai-Chun Chu, Kuo-Chi Chang, Fu-Hsiang Chang, Hsiao-Chuan Wang, Yuh-Chung Lin, Tsui-Lien Hsu, Trong-The Nguyen, Tien-Wen Sung 0001. Study of the Degree of Automation of High-Tech Smart Factory: Taiwan 12" Semiconductor Factory Case Study. In Aboul Ella Hassanien, Kuo-Chi Chang, Mincong Tang, editors, Advanced Machine Learning Technologies and Applications - Proceedings of AMLTA 2021, Cairo, Egypt, March 22-24, 2021. Volume 1339 of Advances in Intelligent Systems and Computing, pages 514-524, Springer, 2021. [doi]

@inproceedings{ChuCCWLHN021,
  title = {Study of the Degree of Automation of High-Tech Smart Factory: Taiwan 12" Semiconductor Factory Case Study},
  author = {Kai-Chun Chu and Kuo-Chi Chang and Fu-Hsiang Chang and Hsiao-Chuan Wang and Yuh-Chung Lin and Tsui-Lien Hsu and Trong-The Nguyen and Tien-Wen Sung 0001},
  year = {2021},
  doi = {10.1007/978-3-030-69717-4_49},
  url = {https://doi.org/10.1007/978-3-030-69717-4_49},
  researchr = {https://researchr.org/publication/ChuCCWLHN021},
  cites = {0},
  citedby = {0},
  pages = {514-524},
  booktitle = {Advanced Machine Learning Technologies and Applications - Proceedings of AMLTA 2021, Cairo, Egypt, March 22-24, 2021},
  editor = {Aboul Ella Hassanien and Kuo-Chi Chang and Mincong Tang},
  volume = {1339},
  series = {Advances in Intelligent Systems and Computing},
  publisher = {Springer},
  isbn = {978-3-030-69717-4},
}