Study of the Degree of Automation of High-Tech Smart Factory: Taiwan 12" Semiconductor Factory Case Study

Kai-Chun Chu, Kuo-Chi Chang, Fu-Hsiang Chang, Hsiao-Chuan Wang, Yuh-Chung Lin, Tsui-Lien Hsu, Trong-The Nguyen, Tien-Wen Sung 0001. Study of the Degree of Automation of High-Tech Smart Factory: Taiwan 12" Semiconductor Factory Case Study. In Aboul Ella Hassanien, Kuo-Chi Chang, Mincong Tang, editors, Advanced Machine Learning Technologies and Applications - Proceedings of AMLTA 2021, Cairo, Egypt, March 22-24, 2021. Volume 1339 of Advances in Intelligent Systems and Computing, pages 514-524, Springer, 2021. [doi]

Abstract

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