Hsing-Yi Chung, Rongshun Chen. Characterization and Analysis of Vertically Comb-driven Micromirrors. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 335-340, IEEE Computer Society, 2005. [doi]
Abstract is missing.