Investigation of acoustic properties and Raman scattering of AlN films for biosensor application - researchr publication authors

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Chung-Jen Chung, Po-Tsung Hsieh, Jen-Fin Lin, Cheng-Hsiang Lin, Kuo-Chih Chiu, Shean-Jen Chen, Ching-Liang Wei, Wei-Tsai Chang, Cheng-Ting Chen, Ying-Chung Chen, Kuo-Sheng Kao, Chien-Chuan Cheng. Investigation of acoustic properties and Raman scattering of AlN films for biosensor application. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 618-621, IEEE, 2011. [doi]

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