Investigation of acoustic properties and Raman scattering of AlN films for biosensor application

Chung-Jen Chung, Po-Tsung Hsieh, Jen-Fin Lin, Cheng-Hsiang Lin, Kuo-Chih Chiu, Shean-Jen Chen, Ching-Liang Wei, Wei-Tsai Chang, Cheng-Ting Chen, Ying-Chung Chen, Kuo-Sheng Kao, Chien-Chuan Cheng. Investigation of acoustic properties and Raman scattering of AlN films for biosensor application. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 618-621, IEEE, 2011. [doi]

@inproceedings{ChungHLLCCWCCCKC11,
  title = {Investigation of acoustic properties and Raman scattering of AlN films for biosensor application},
  author = {Chung-Jen Chung and Po-Tsung Hsieh and Jen-Fin Lin and Cheng-Hsiang Lin and Kuo-Chih Chiu and Shean-Jen Chen and Ching-Liang Wei and Wei-Tsai Chang and Cheng-Ting Chen and Ying-Chung Chen and Kuo-Sheng Kao and Chien-Chuan Cheng},
  year = {2011},
  doi = {10.1109/NEMS.2011.6017431},
  url = {http://dx.doi.org/10.1109/NEMS.2011.6017431},
  researchr = {https://researchr.org/publication/ChungHLLCCWCCCKC11},
  cites = {0},
  citedby = {0},
  pages = {618-621},
  booktitle = {6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  publisher = {IEEE},
}