Sheng-Luen Chung, MuDer Jeng. Fabulous MESs and C/Cs: an overview of semiconductor fab automation systems. IEEE Robot. Automat. Mag., 11(1):8-18, 2004. [doi]
@article{ChungJ04,
title = {Fabulous MESs and C/Cs: an overview of semiconductor fab automation systems},
author = {Sheng-Luen Chung and MuDer Jeng},
year = {2004},
doi = {10.1109/MRA.2004.1275943},
url = {http://dx.doi.org/10.1109/MRA.2004.1275943},
researchr = {https://researchr.org/publication/ChungJ04},
cites = {0},
citedby = {0},
journal = {IEEE Robot. Automat. Mag.},
volume = {11},
number = {1},
pages = {8-18},
}