C. K. Chung, S. L. Lin, K. C. Chang, H.-Y. Wang. Fabrication and simulation of PDMS assisted CO2 laser ablation. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 650-653, IEEE, 2010. [doi]
@inproceedings{ChungLCW10,
title = {Fabrication and simulation of PDMS assisted CO2 laser ablation},
author = {C. K. Chung and S. L. Lin and K. C. Chang and H.-Y. Wang},
year = {2010},
doi = {10.1109/NEMS.2010.5592489},
url = {http://dx.doi.org/10.1109/NEMS.2010.5592489},
researchr = {https://researchr.org/publication/ChungLCW10},
cites = {0},
citedby = {0},
pages = {650-653},
booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
publisher = {IEEE},
}