Poly-Crystalline Silicon Waveguide Devices on Hollow Deep Trench Isolation in Standard Foundry Bulk Silicon Process - researchr publication authors

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Sungwon Chung, Makoto Nakai, Edward Preisler, Hossein Hashemi 0001. Poly-Crystalline Silicon Waveguide Devices on Hollow Deep Trench Isolation in Standard Foundry Bulk Silicon Process. In Optical Fiber Communications Conference and Exposition, OFC 2018, San Diego, CA, USA, March 11-15, 2018. pages 1-3, IEEE, 2018. [doi]

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