Sungwon Chung, Makoto Nakai, Edward Preisler, Hossein Hashemi 0001. Poly-Crystalline Silicon Waveguide Devices on Hollow Deep Trench Isolation in Standard Foundry Bulk Silicon Process. In Optical Fiber Communications Conference and Exposition, OFC 2018, San Diego, CA, USA, March 11-15, 2018. pages 1-3, IEEE, 2018. [doi]
@inproceedings{ChungNP018,
title = {Poly-Crystalline Silicon Waveguide Devices on Hollow Deep Trench Isolation in Standard Foundry Bulk Silicon Process},
author = {Sungwon Chung and Makoto Nakai and Edward Preisler and Hossein Hashemi 0001},
year = {2018},
url = {http://ieeexplore.ieee.org/document/8386252},
researchr = {https://researchr.org/publication/ChungNP018},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {Optical Fiber Communications Conference and Exposition, OFC 2018, San Diego, CA, USA, March 11-15, 2018},
publisher = {IEEE},
isbn = {978-1-943580-38-5},
}