Multichannel 65 zF rms Resolution CMOS Monolithic Capacitive Sensor for Counting Single Micrometer-Sized Airborne Particles on Chip

Pietro Ciccarella, Marco Carminati, Marco Sampietro, Giorgio Ferrari. Multichannel 65 zF rms Resolution CMOS Monolithic Capacitive Sensor for Counting Single Micrometer-Sized Airborne Particles on Chip. J. Solid-State Circuits, 51(11):2545-2553, 2016. [doi]

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