Low actuation voltage silicon carbide RF switches for MEMS above IC - researchr publication authors

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Paul-Vahe Cicek, Sareh Mahdavi, Frederic Nabki, Mourad N. El-Gamal. Low actuation voltage silicon carbide RF switches for MEMS above IC. In 16th IEEE International Conference on Electronics, Circuits, and Systems, ICECS 2009, Yasmine Hammamet, Tunesia, 13-19 December, 2009. pages 223-226, IEEE, 2009. [doi]

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