Low actuation voltage silicon carbide RF switches for MEMS above IC

Paul-Vahe Cicek, Sareh Mahdavi, Frederic Nabki, Mourad N. El-Gamal. Low actuation voltage silicon carbide RF switches for MEMS above IC. In 16th IEEE International Conference on Electronics, Circuits, and Systems, ICECS 2009, Yasmine Hammamet, Tunesia, 13-19 December, 2009. pages 223-226, IEEE, 2009. [doi]

@inproceedings{CicekMNE09,
  title = {Low actuation voltage silicon carbide RF switches for MEMS above IC},
  author = {Paul-Vahe Cicek and Sareh Mahdavi and Frederic Nabki and Mourad N. El-Gamal},
  year = {2009},
  doi = {10.1109/ICECS.2009.5410976},
  url = {http://dx.doi.org/10.1109/ICECS.2009.5410976},
  researchr = {https://researchr.org/publication/CicekMNE09},
  cites = {0},
  citedby = {0},
  pages = {223-226},
  booktitle = {16th IEEE International Conference on Electronics, Circuits, and Systems, ICECS 2009, Yasmine Hammamet, Tunesia, 13-19 December, 2009},
  publisher = {IEEE},
  isbn = {978-1-4244-5090-9},
}