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Simulation of ESD protection devices in an advanced CMOS technology using a TCAD workbench based on an ESD calibration methodology

T. Cilento, M. Schenkel, C. Yun, R. Mishra, Junjun Li, Kiran V. Chatty, Robert Gauthier. Simulation of ESD protection devices in an advanced CMOS technology using a TCAD workbench based on an ESD calibration methodology. Microelectronics Reliability, 50(9-11):1367-1372, 2010. [doi]

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