Micro-prober for wafer-level low-noise measurements in MOS devices

Carmine Ciofi, Felice Crupi, Calogero Pace, Graziella Scandurra. Micro-prober for wafer-level low-noise measurements in MOS devices. IEEE T. Instrumentation and Measurement, 52(5):1533-1536, 2003. [doi]

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