Lavinia Ciotirca, Olivier Bernal, Helene Tap, Jerome Enjalbert, Thierry Cassagnes. 3-axis high Q MEMS accelerometer with simultaneous damping control. In 14th IEEE International New Circuits and Systems Conference, NEWCAS 2016, Vancouver, BC, Canada, June 26-29, 2016. pages 1-4, IEEE, 2016. [doi]
Abstract is missing.