Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities

Albrey de Clerck, Yuhong Kang, Ridge Sibold, Scott Mouring, Hang Ruan, Wing Ng. Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities. Sensors, 22(10):3828, 2022. [doi]

Abstract

Abstract is missing.