On-chip metallization layers for reflective light valves

Evan G. Colgan, Mitsuru Uda. On-chip metallization layers for reflective light valves. IBM Journal of Research and Development, 42(3):339-346, 1998. [doi]

@article{ColganU98,
  title = {On-chip metallization layers for reflective light valves},
  author = {Evan G. Colgan and Mitsuru Uda},
  year = {1998},
  doi = {10.1147/rd.423.0339},
  url = {http://dx.doi.org/10.1147/rd.423.0339},
  researchr = {https://researchr.org/publication/ColganU98},
  cites = {0},
  citedby = {0},
  journal = {IBM Journal of Research and Development},
  volume = {42},
  number = {3},
  pages = {339-346},
}