A domain decomposition method for the simulation of fracture in polysilicon MEMS

Federica Confalonieri, Giuseppe Cocchetti, Aldo Ghisi, Alberto Corigliano. A domain decomposition method for the simulation of fracture in polysilicon MEMS. Microelectronics Reliability, 53(8):1045-1054, 2013. [doi]

Authors

Federica Confalonieri

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Giuseppe Cocchetti

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Aldo Ghisi

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Alberto Corigliano

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