A domain decomposition method for the simulation of fracture in polysilicon MEMS

Federica Confalonieri, Giuseppe Cocchetti, Aldo Ghisi, Alberto Corigliano. A domain decomposition method for the simulation of fracture in polysilicon MEMS. Microelectronics Reliability, 53(8):1045-1054, 2013. [doi]

Abstract

Abstract is missing.