Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Christine E. Murabito, Ronald G. Dixson, Amy Hunt. Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures Having Feature Linewidths From 40 to 240 nm. IEEE T. Instrumentation and Measurement, 57(1):100-109, 2008. [doi]
Abstract is missing.