Development of a permittivity extraction method for ultra low k dielectrics integrated in advanced interconnects - researchr publication authors

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O. Cueto, Myriam Assous, François de Crecy, A. Toffoli, David Bouchu, M. Fayolle, Frédéric Boulanger. Development of a permittivity extraction method for ultra low k dielectrics integrated in advanced interconnects. Microelectronics Reliability, 47(4-5):769-772, 2007. [doi]

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