Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

Feng Cui, Wu Liu, Wenyuan Chen, Weiping Zhang, Xiaosheng Wu. Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer. Sensors, 11(12):11206-11234, 2011. [doi]

Abstract

Abstract is missing.