Thermal Stabilization of Quality Factor for Dual-Axis MEMS Gyroscope Based on Joule Effect In Situ Dynamic Tuning

Jian Cui, Qiancheng Zhao. Thermal Stabilization of Quality Factor for Dual-Axis MEMS Gyroscope Based on Joule Effect In Situ Dynamic Tuning. IEEE Transactions on Industrial Electronics, 71(1):1060-1068, 2024. [doi]

Abstract

Abstract is missing.