Characterizations of high resistivity TiN::x::O::y:: thin films for applications in thin film resistors

Nguyen Duy Cuong, Dong Jin Kim, Byoung-Don Kang, Chang Soo Kim, Soon-Gil Yoon. Characterizations of high resistivity TiN::x::O::y:: thin films for applications in thin film resistors. Microelectronics Reliability, 47(4-5):752-754, 2007. [doi]

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