Nguyen Duy Cuong, Dong Jin Kim, Byoung-Don Kang, Chang Soo Kim, Soon-Gil Yoon. Characterizations of high resistivity TiN::x::O::y:: thin films for applications in thin film resistors. Microelectronics Reliability, 47(4-5):752-754, 2007. [doi]
@article{CuongKKKY07,
title = {Characterizations of high resistivity TiN::x::O::y:: thin films for applications in thin film resistors},
author = {Nguyen Duy Cuong and Dong Jin Kim and Byoung-Don Kang and Chang Soo Kim and Soon-Gil Yoon},
year = {2007},
doi = {10.1016/j.microrel.2007.01.014},
url = {http://dx.doi.org/10.1016/j.microrel.2007.01.014},
researchr = {https://researchr.org/publication/CuongKKKY07},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {47},
number = {4-5},
pages = {752-754},
}