Growth process and chemical characterization of an ultrathin phosphate film grafted onto Al-alloy metallization surfaces relevant to microelectronic devices reliability

G. Curro, R. Greco, A. Scandurra. Growth process and chemical characterization of an ultrathin phosphate film grafted onto Al-alloy metallization surfaces relevant to microelectronic devices reliability. Microelectronics Reliability, 42(9-11):1659-1662, 2002. [doi]

Abstract

Abstract is missing.