Smart laser sensor with measurement uncertainties beyond the diffraction limit

Jürgen Czarske, Jörg König, Lars Büttner. Smart laser sensor with measurement uncertainties beyond the diffraction limit. In International Multi-Conference on Systems, Signals & Devices, SSD 2012, Chemnitz, Germany, March 20-23, 2012. pages 1-5, IEEE, 2012. [doi]

Abstract

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