Turbomolecular high-vacuum pump bearings diagnostics using temperature and vibration measurements

Alessandro Paolo Daga, Luigi Garibaldi, Luca Bonmassar. Turbomolecular high-vacuum pump bearings diagnostics using temperature and vibration measurements. In IEEE International Workshop on Metrology for Industry 4.0 & IoT, MetroInd4.0&IoT 2021, Rome, Italy, June 7-9, 2021. pages 264-269, IEEE, 2021. [doi]

Authors

Alessandro Paolo Daga

This author has not been identified. Look up 'Alessandro Paolo Daga' in Google

Luigi Garibaldi

This author has not been identified. Look up 'Luigi Garibaldi' in Google

Luca Bonmassar

This author has not been identified. Look up 'Luca Bonmassar' in Google