Ching-Liang Dai, De-Hao Lu. Fabrication of a micro humidity sensor with polypyrrole using the CMOS process. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 110-113, IEEE, 2010. [doi]
Abstract is missing.