Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

Ching-Liang Dai, Po-Wei Lu, Chienliu Chang, Cheng-Yang Liu. Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip. Sensors, 9(12):10158-10170, 2009. [doi]

@article{DaiLCL09,
  title = {Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip},
  author = {Ching-Liang Dai and Po-Wei Lu and Chienliu Chang and Cheng-Yang Liu},
  year = {2009},
  doi = {10.3390/s91210158},
  url = {http://dx.doi.org/10.3390/s91210158},
  researchr = {https://researchr.org/publication/DaiLCL09},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {9},
  number = {12},
  pages = {10158-10170},
}